After the Battle of Aughrim the title Viscount Galway was given to a noble loyal to the cause of William the III. This noble was Henri de Massue de Ruvigny.

De Massue was a Huguenot (Protestant) noble living in pre-dominantly Catholic France who entered the service of William III, thus forfeiting his French titles. After he was awarded the title Viscount Galway he had a dominant role in Irish politics, eventually becoming the Lord Justice of Ireland. In 1697 when he was appointed Lord Justice he also became the Earl of Galway. He also saw sporadic military service untile 1715, when he retired from his posts. After years of eventful service to the British Crown de Massue died in 1720, leaving no heirs for the title Viscount Galway.

In 1727 the title Viscount Galway was resurrected for the forth time, this time awarded to John Monckton. Along with the Viscount title, Monckton and his predecessors were also given the title Baron Killard of the County of Clare.